JPS6124883Y2 - - Google Patents

Info

Publication number
JPS6124883Y2
JPS6124883Y2 JP16400878U JP16400878U JPS6124883Y2 JP S6124883 Y2 JPS6124883 Y2 JP S6124883Y2 JP 16400878 U JP16400878 U JP 16400878U JP 16400878 U JP16400878 U JP 16400878U JP S6124883 Y2 JPS6124883 Y2 JP S6124883Y2
Authority
JP
Japan
Prior art keywords
aperture
substrate
plate
hole
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16400878U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5580709U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16400878U priority Critical patent/JPS6124883Y2/ja
Publication of JPS5580709U publication Critical patent/JPS5580709U/ja
Application granted granted Critical
Publication of JPS6124883Y2 publication Critical patent/JPS6124883Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP16400878U 1978-11-30 1978-11-30 Expired JPS6124883Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16400878U JPS6124883Y2 (en]) 1978-11-30 1978-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16400878U JPS6124883Y2 (en]) 1978-11-30 1978-11-30

Publications (2)

Publication Number Publication Date
JPS5580709U JPS5580709U (en]) 1980-06-03
JPS6124883Y2 true JPS6124883Y2 (en]) 1986-07-26

Family

ID=29161152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16400878U Expired JPS6124883Y2 (en]) 1978-11-30 1978-11-30

Country Status (1)

Country Link
JP (1) JPS6124883Y2 (en])

Also Published As

Publication number Publication date
JPS5580709U (en]) 1980-06-03

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